Invention Grant
US07935474B2 Acid-amplifier having acetal group and photoresist composition including the same
失效
具有缩醛基的酸性放大器和包含其的光致抗蚀剂组合物
- Patent Title: Acid-amplifier having acetal group and photoresist composition including the same
- Patent Title (中): 具有缩醛基的酸性放大器和包含其的光致抗蚀剂组合物
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Application No.: US12174759Application Date: 2008-07-17
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Publication No.: US07935474B2Publication Date: 2011-05-03
- Inventor: Jung-Youl Lee , Min-Ja Yoo , Jeong-Sik Kim , Young-Bae Lim , Jae-Woo Lee , Jae-Hyun Kim
- Applicant: Jung-Youl Lee , Min-Ja Yoo , Jeong-Sik Kim , Young-Bae Lim , Jae-Woo Lee , Jae-Hyun Kim
- Applicant Address: KR Incheon
- Assignee: Dongjin Semichem Co., Ltd.
- Current Assignee: Dongjin Semichem Co., Ltd.
- Current Assignee Address: KR Incheon
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: KR10-2007-0073117 20070720
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30

Abstract:
An acid-amplifier having an acetal group and a photoresist composition including the same, are disclosed. The acid-amplifier produces an acid (second acid) during a post-exposure-bake (PEB), which is induced by an acid (first acid) generated from a photo-acid generator (PAG) at the exposure process so that a line edge roughness (LER) of the photoresist pattern and photoresist energy sensitivity are improved. The acid-amplifier has a structure of following Formula 1. in Formula 1, R is C4˜C20 mono-cyclic or multi-cyclic saturated hydrocarbon, R1 is C1˜C10 linear hydrocarbon, C1˜C10 perfluoro compound or C5˜C20 aromatic compound, Ra and Rb are independently hydrogen atom or C1˜C4 saturated hydrocarbon and A is independently oxygen atom (O) or sulfur atom (S).
Public/Granted literature
- US20090023093A1 ACID-AMPLIFIER HAVING ACETAL GROUP AND PHOTORESIST COMPOSITION INCLUDING THE SAME Public/Granted day:2009-01-22
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