发明授权
- 专利标题: Semiconductor device and method of embedding integrated passive devices into the package electrically interconnected using conductive pillars
- 专利标题(中): 将集成无源器件嵌入到使用导电柱电互连的封装中的半导体器件和方法
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申请号: US12331698申请日: 2008-12-10
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公开(公告)号: US07935570B2公开(公告)日: 2011-05-03
- 发明人: Yaojian Lin , Jianmin Fang , Kang Chen , Haijing Cao
- 申请人: Yaojian Lin , Jianmin Fang , Kang Chen , Haijing Cao
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group
- 代理商 Robert D. Atkins
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A semiconductor device has a first insulation layer formed over a sacrificial substrate. A first conductive layer is formed over the first insulating layer. Conductive pillars are formed over the first conductive layer. A pre-fabricated IPD is disposed between the conductive pillars. An encapsulant is formed around the IPD and conductive pillars. A second insulation layer is formed over the encapsulant. The conductive pillars are electrically connected to the first and second conductive layers. The first and second conductive layers each include an inductor. Semiconductor devices are mounted over the first and second insulating layer and electrically connected to the first and second conductive layers, respectively. An interconnect structure is formed over the first and second insulating layers, respectively, and electrically connected to the first and second conductive layers. The sacrificial substrate is removed. The semiconductor devices can be stacked and electrically interconnected through the conductive pillars.
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