Invention Grant
- Patent Title: Storage cell having a T-shaped gate electrode and method for manufacturing the same
- Patent Title (中): 具有T形栅电极的存储单元及其制造方法
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Application No.: US12131794Application Date: 2008-06-02
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Publication No.: US07935608B2Publication Date: 2011-05-03
- Inventor: Frank Heinrichsdorff , Nicolas Nagel , Jens-Uwe Sachse , Andreas Voerckel , Dominik Olligs , Torsten Mueller
- Applicant: Frank Heinrichsdorff , Nicolas Nagel , Jens-Uwe Sachse , Andreas Voerckel , Dominik Olligs , Torsten Mueller
- Applicant Address: DE Munich
- Assignee: Qimonda AG
- Current Assignee: Qimonda AG
- Current Assignee Address: DE Munich
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
A method for manufacturing an integrated circuit including at least one storage cell is provided. The method includes providing a substrate having a first and second side, and a plurality of parallel trenches so that a dividing wall is formed between adjacent trenches, filling the trenches with an insulating compound, providing a first insulating layer having a first and second side on the top surface of the dividing wall, wherein the first side is arranged on the substrate's first side, providing a first conductive layer having a first and second side, wherein the first side is arranged on the insulating layer's second side, wherein the conductive layer protrudes from the substrate surface, providing a second conductive layer having a first and second side, wherein the first side is located on the first conductive layer's second side, and removing parts of the second conductive layer by an anisotropic etching means.
Public/Granted literature
- US20090294825A1 STORAGE CELL HAVING A T-SHAPED GATE ELECTRODE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-12-03
Information query
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