- 专利标题： Method of manufacturing solid state imaging device, solid state imaging device, and camera using solid state imaging device
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申请号： US12468593申请日： 2009-05-19
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公开(公告)号： US07935988B2公开(公告)日： 2011-05-03
- 发明人: Takeshi Takeda , Tadayuki Dofuku , Kenji Takeo
- 申请人： Takeshi Takeda , Tadayuki Dofuku , Kenji Takeo
- 申请人地址： JP Tokyo
- 专利权人： Sony Corporation
- 当前专利权人： Sony Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Rockey, Depke & Lyons, LLC
- 代理商 Robert J. Depke
- 优先权： JP2005-256694 20050905; JP2005-275823 20050922
- 主分类号： H01L27/148
- IPC分类号： H01L27/148
摘要：
A method of manufacturing a solid state imaging device having a photo-electric conversion portion array and a transfer electrode array, these arrays being provided in parallel to each other, upper surfaces and side wall surfaces of the transfer electrode array being covered with a light-shielding layer, and a transparent layer showing an oxidizing property at the time of film formation, the transparent layer being formed on the photo-electric conversion parts and the light-shielding layer.
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