Invention Grant
- Patent Title: Light absorbent and organic antireflection coating composition containing the same
- Patent Title (中): 含有该吸收剂和有机抗反射涂料的组合物
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Application No.: US12157819Application Date: 2008-06-13
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Publication No.: US07939245B2Publication Date: 2011-05-10
- Inventor: Joo-Hyeon Park , Ji-Young Kim , Jun-Ho Lee
- Applicant: Joo-Hyeon Park , Ji-Young Kim , Jun-Ho Lee
- Applicant Address: KR Seoul
- Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Davidson, Davidson & Kappel, LLC
- Priority: KR10-2008-0033712 20080411
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C08F2/44 ; C09K3/00 ; H01L21/30

Abstract:
The present invention relates to a light absorbent for organic anti-reflection coating formation, and an organic anti-reflection film composition containing the same. The light absorbent for organic anti-reflection film formation according to the present invention is a compound of the following formula (1a), a compound of the following formula (1b), a mixture of compounds of the formulas (1a) and (1b): wherein X is selected from the group consisting of a substituted or unsubstituted cyclic group having 1 to 20 carbon atoms, aryl, diaryl ether, diaryl sulfide, diaryl sulfoxide and diaryl ketone; and R1 is a hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, or an aryl group having 1 to 14 carbon atoms.
Public/Granted literature
- US20090258321A1 Light absorbent and organic antireflection coating composition containing the same Public/Granted day:2009-10-15
Information query
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