发明授权
US07943196B2 Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates
有权
使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
- 专利标题: Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates
- 专利标题(中): 使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
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申请号: US11273316申请日: 2005-11-14
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公开(公告)号: US07943196B2公开(公告)日: 2011-05-17
- 发明人: Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir I. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
- 申请人: Anatoli V. Melechko , Timothy E. McKnight , Michael A. Guillorn , Bojan Ilic , Vladimir I. Merkulov , Mitchel J. Doktycz , Douglas H. Lowndes , Michael L. Simpson
- 申请人地址: US TN Oak Ridge
- 专利权人: UT-Battelle, LLC
- 当前专利权人: UT-Battelle, LLC
- 当前专利权人地址: US TN Oak Ridge
- 代理机构: Brinks Hofer Gilson & Lione
- 主分类号: B05D3/00
- IPC分类号: B05D3/00 ; B05D1/32 ; B05D5/12 ; C23C16/00 ; D02G3/00 ; B32B5/12
摘要:
Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.