发明授权
- 专利标题: Apparatus and method for semiconductor bonding
- 专利标题(中): 用于半导体结合的装置和方法
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申请号: US11766531申请日: 2007-06-21
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公开(公告)号: US07948034B2公开(公告)日: 2011-05-24
- 发明人: Gregory George , Etienne Hancock , Robert Campbell
- 申请人: Gregory George , Etienne Hancock , Robert Campbell
- 申请人地址: DE Garching
- 专利权人: Suss Microtec Lithography, GmbH
- 当前专利权人: Suss Microtec Lithography, GmbH
- 当前专利权人地址: DE Garching
- 代理机构: AKC Patents LLC
- 代理商 Aliki K. Collins
- 主分类号: H01L27/12
- IPC分类号: H01L27/12
摘要:
An apparatus for bonding semiconductor structures includes equipment for positioning a first surface of a first semiconductor structure directly opposite and in contact with a first surface of a second semiconductor structure and equipment for forming a bond interface area between the first surfaces of the first and second semiconductor structures by pressing the first and second semiconductor structures together with a force column configured to apply uniform pressure to the entire bond interface area between the first surfaces.
公开/授权文献
- US20070296035A1 APPARATUS AND METHOD FOR SEMICONDUCTOR BONDING 公开/授权日:2007-12-27
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