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US07948034B2 Apparatus and method for semiconductor bonding 有权
用于半导体结合的装置和方法

Apparatus and method for semiconductor bonding
摘要:
An apparatus for bonding semiconductor structures includes equipment for positioning a first surface of a first semiconductor structure directly opposite and in contact with a first surface of a second semiconductor structure and equipment for forming a bond interface area between the first surfaces of the first and second semiconductor structures by pressing the first and second semiconductor structures together with a force column configured to apply uniform pressure to the entire bond interface area between the first surfaces.
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