发明授权
- 专利标题： Interferometer and method for measuring characteristics of optically unresolved surface features
- 专利标题（中）： 用于测量光学未解析表面特征的干涉仪和方法
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申请号： US12701690申请日： 2010-02-08
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公开(公告)号： US07948636B2公开(公告)日： 2011-05-24
- 发明人: Peter De Groot , Michael J Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
- 申请人： Peter De Groot , Michael J Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
- 申请人地址： US CT Middlefield
- 专利权人： Zygo Corporation
- 当前专利权人： Zygo Corporation
- 当前专利权人地址： US CT Middlefield
- 代理机构： Fish & Richardson P.C.
- 主分类号： G01B11/02
- IPC分类号： G01B11/02
摘要：
Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
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