发明授权
US07952694B2 Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
有权
用于监测静电卡盘边缘珠材料侵蚀的光学系统和方法
- 专利标题: Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
- 专利标题(中): 用于监测静电卡盘边缘珠材料侵蚀的光学系统和方法
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申请号: US12887829申请日: 2010-09-22
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公开(公告)号: US07952694B2公开(公告)日: 2011-05-31
- 发明人: Bradley J. Howard , Eric Pape , Siwen Li
- 申请人: Bradley J. Howard , Eric Pape , Siwen Li
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Schwegman, Lundberg & Woessner, P.A.
- 主分类号: G01J3/30
- IPC分类号: G01J3/30 ; G01N27/04
摘要:
A disclosed device comprises an edge bonding seal configured to be mounted to an edge bead of the electrostatic chuck. The edge bonding seal includes a monitoring layer comprised of a first material configured to emit a species capable of being optically monitored. The edge bonding seal further includes an edge bonding layer configured to be interspersed at least between the monitoring layer and the plasma environment. The edge bonding layer is comprised of a second material susceptible to erosion due to reaction with the plasma environment and configured to expose the monitoring layer to the plasma environment upon sufficient exposure to the plasma environment.
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