发明授权
- 专利标题: Reflective-type mask
- 专利标题(中): 反光型面膜
-
申请号: US12329126申请日: 2008-12-05
-
公开(公告)号: US07960076B2公开(公告)日: 2011-06-14
- 发明人: Takashi Kamo , Osamu Suga , Toshihiko Tanaka
- 申请人: Takashi Kamo , Osamu Suga , Toshihiko Tanaka
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba,Renesas Technology Corp.
- 当前专利权人: Kabushiki Kaisha Toshiba,Renesas Technology Corp.
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2007-317695 20071207
- 主分类号: G03F1/00
- IPC分类号: G03F1/00
摘要:
A reflective-type mask having a main surface including a pattern region in the main surface, the pattern region including a multilayer reflective film which reflects the exposure light and a first absorber pattern on the multilayer reflective film, the first absorber pattern including a pattern which absorbs the exposure light and corresponds to a pattern to be formed on a wafer, a light shielding region in the main surface for preventing a region on the wafer excluding a predetermined region from being irradiated with the exposure light when the main surface is irradiated with the exposure light for transferring the first absorber pattern to the predetermined region, the light shielding region including a second absorber pattern having a lower reflectivity to the exposure light than the first absorber pattern and being provided in a position differing from a position in which the first absorber pattern is provided.
公开/授权文献
- US20090148781A1 REFLECTIVE-TYPE MASK 公开/授权日:2009-06-11
信息查询