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    Method of manufacturing EUV mask
    1.
    发明授权
    Method of manufacturing EUV mask 有权
    制造EUV面膜的方法

    公开(公告)号：US08778571B2

    公开(公告)日：2014-07-15

    申请号：US13592333

    申请日：2012-08-22

    Applicant: Toshihiko Tanaka

    Inventor： Toshihiko Tanaka

    IPC: G03F1/00 ,  G03F1/24 ,  G03F1/72 ,  G03F1/82 ,  G03F1/84

    CPC classification number: G03F1/24 ,  G03F1/72 ,  G03F1/82 ,  G03F1/84

    Abstract: Techniques for easily fabricating defect-free EUV masks with good yield are provided. A method of manufacturing an EUV mask according to the present invention includes the steps of: carrying out a defect inspection after depositing a multilayer film on a substrate; if a defect is found in the defect inspection, determining whether the defect is a recessed defect, a protruded defect, or defects in which the recessed defect and the protruded defect are mixed, and if the defects are the mixed defects of the recessed defect and the protruded defect, determining the relation in size between the defects; and depositing an additional multilayer film on the multilayer film while changing a film forming method in accordance with the results of the determination.

    Abstract translation: 提供了用于容易地制造具有良好产量的无缺陷EUV掩模的技术。 根据本发明的制造EUV掩模的方法包括以下步骤：在将多层膜沉积在基板上之后执行缺陷检查; 如果在缺陷检查中发现缺陷，则确定缺陷是凹陷缺陷，突出缺陷还是凹陷缺陷和突出缺陷混合的缺陷，并且如果缺陷是凹陷缺陷的混合缺陷和 突出的缺陷，确定缺陷之间的尺寸关系; 并且在根据测定结果改变成膜方法的同时在多层膜上沉积另外的多层膜。

    Atopic dermatitis inducer
    4.
    发明授权
    Atopic dermatitis inducer 有权
    特应性皮炎诱导剂

    公开(公告)号：US08129507B2

    公开(公告)日：2012-03-06

    申请号：US12461368

    申请日：2009-08-10

    Applicant: Michihiro Hide ,  Toshihiko Tanaka ,  Akio Tanaka ,  Kaori Ishii ,  Hidenori Suzuki

    Inventor： Michihiro Hide ,  Toshihiko Tanaka ,  Akio Tanaka ,  Kaori Ishii ,  Hidenori Suzuki

    IPC: A23J1/00 ,  C07K1/00 ,  C07K14/00 ,  C07K16/00 ,  C07K17/00

    CPC classification number: C07K16/4291 ,  A61K2039/505 ,  C07K14/47

    Abstract: An atopic dermatitis inducer binding to a human own IgE antibody and activating mast cells and basophiles, which includes a purified human secretion fraction, or an antigenic molecule or an antigenic determinant in the purified fraction, and obtained through the following steps of: filtering a human secretion, removing insoluble matters and collecting the filtrate; mixing the filtrate with a ConA-affinity carrier and collecting the supernatant; and separating a component having a histamine-releasing activity from the supernatant by column chromatography. This inducer is effective in diagnosing and treating human atopic dermatitis.

    Abstract translation: 特异性皮炎诱导剂与人自身的IgE抗体结合并激活肥大细胞和嗜碱性细胞，其包括纯化的人分泌部分，或纯化级分中的抗原性分子或抗原决定簇，并通过以下步骤获得：过滤人 分泌，去除不溶物并收集滤液; 将滤液与ConA亲和载体混合并收集上清液; 并通过柱层析从上清液中分离具有组胺释放活性的组分。 该诱导剂有效地诊断和治疗人类特应性皮炎。

    ABNORMALITY DIAGNOSTIC DEVICE OF INTERNAL COMBUSTION ENGINE WITH TURBOCHARGER
    5.
    发明申请
    ABNORMALITY DIAGNOSTIC DEVICE OF INTERNAL COMBUSTION ENGINE WITH TURBOCHARGER 失效
    内燃机与涡轮增压器异常诊断装置

    公开(公告)号：US20110219861A1

    公开(公告)日：2011-09-15

    申请号：US13044021

    申请日：2011-03-09

    Applicant: Ryozo KAYAMA ,  Toshihiko Tanaka ,  Masahiro Kubo

    Inventor： Ryozo KAYAMA ,  Toshihiko Tanaka ,  Masahiro Kubo

    IPC: G01M15/10

    CPC classification number: F02D41/22 ,  F02D41/0007 ,  F02D41/0085 ,  Y02T10/40

    Abstract: When a wastegate valve, which opens and closes an exhaust bypass passage bypassing an exhaust turbine, is open, exhaust gases of respective cylinders bypass the exhaust turbine and pass a sensing point of an air-fuel ratio sensor downstream of the exhaust turbine. Accordingly, the exhaust gases of the respective cylinders can be avoided from being mixed by the exhaust turbine, so an influence of an inter-cylinder variation in an air-fuel ratio due to an inter-cylinder imbalance abnormality becomes apt to appear in an output waveform of the air-fuel ratio sensor. Therefore, existence or nonexistence of the inter-cylinder imbalance abnormality is determined based on the output of the air-fuel ratio sensor when the wastegate valve is open. Eventually, the existence or nonexistence of the inter-cylinder imbalance abnormality can be determined accurately, thereby improving detection accuracy of the inter-cylinder imbalance abnormality.

    Abstract translation: 当打开和关闭旁路排气涡轮机的排气旁通通道的废气门打开时，各个气缸的废气旁路排气涡轮并将排气涡轮下游的空燃比传感器的感测点通过。 因此，可以避免各气缸的排气被排气涡轮混合，因此，由于气缸内不平衡异常引起的气缸内的变化对空燃比的影响容易出现在输出 空燃比传感器的波形。 因此，当排气门阀打开时，基于空燃比传感器的输出来确定气缸间不平衡异常的存在或不存在。 最终，可以精确地确定气缸内不平衡异常的存在或不存在，从而提高气缸间不平衡异常的检测精度。

    NOVEL SALT OF ISOQUINOLINE COMPOUND AND CRYSTAL THEREOF
    6.
    发明申请
    NOVEL SALT OF ISOQUINOLINE COMPOUND AND CRYSTAL THEREOF 有权
    新型盐酸化合物及其结晶

    公开(公告)号：US20110130419A1

    公开(公告)日：2011-06-02

    申请号：US12672784

    申请日：2008-08-08

    Applicant: Masakazu Fujio ,  Toshihiko Tanaka ,  Hisao Takayanagi ,  Hiroyuki Satoh ,  Takanori Ito

    Inventor： Masakazu Fujio ,  Toshihiko Tanaka ,  Hisao Takayanagi ,  Hiroyuki Satoh ,  Takanori Ito

    IPC: A61K31/4725 ,  C07D401/06 ,  A61P9/10

    CPC classification number: C07D403/06 ,  C07D401/06

    Abstract: The invention provides a salt of (R)-3-[2-(2-hydroxymethylpyrrolidin-1-yl)ethyl]-5-methyl-2H-isoquinolin-1-one and a crystal thereof. (R)-3-[2-(2-Hydroxymethylpyrrolidin-1-yl)ethyl]-5-methyl-2H-isoquinolin-1-one monophosphate is a compound which is chemically stable, has high solubility, and shows less weight change due to humidity as compared to a free form and monohydrochloride dihydrate, and is superior as a bulk drug for pharmaceutical products.

    Abstract translation: 本发明提供（R）-3- [2-（2-羟甲基吡咯烷-1-基）乙基] -5-甲基-2H-异喹啉-1-酮及其结晶的盐。 （R）-3- [2-（2-羟甲基吡咯烷-1-基）乙基] -5-甲基-2H-异喹啉-1-酮单磷酸酯是一种化学稳定的化合物，溶解度高，重量变化较小 由于与游离形式和单盐酸盐二水合物相比的湿度，并且作为药物的主要药物是优异的。

    TRANSPARENT THIN-FILM ELECTRODE
    7.
    发明申请
    TRANSPARENT THIN-FILM ELECTRODE 审中-公开
    透明薄膜电极

    公开(公告)号：US20110001905A1

    公开(公告)日：2011-01-06

    申请号：US12919143

    申请日：2009-02-25

    Applicant: Toshihiko Tanaka

    Inventor： Toshihiko Tanaka

    IPC: G02F1/1335 ,  H01L51/52 ,  H01J1/02 ,  G02B27/28 ,  G02F1/1343 ,  B05D5/12

    CPC classification number: G02F1/13439 ,  G02F2001/133548 ,  H01L51/5206 ,  H01L51/5212 ,  H01L51/5293

    Abstract: Provided is a transparent thin-film electrode characterized in that light transmitted through the transparent thin-film electrode is polarized. The transparent thin-film electrode comprises a conductive polymer or the transparent thin-film electrode comprises a carbon nanotube. Consequently, the transparent thin-film electrode and a liquid crystal display device or a light-emitting element using the same which has industrially satisfactory performance can be provided without using indium that has a problem in terms of stable supply and cost because the amount of indium as a resource is small and the price thereof rises sharply due to stringent demand.

    Abstract translation: 提供一种透明薄膜电极，其特征在于透射透过薄膜电极的光被极化。 透明薄膜电极包括导电聚合物或透明薄膜电极包括碳纳米管。 因此，可以提供具有工业上令人满意的性能的透明薄膜电极和液晶显示装置或使用该透明薄膜电极的发光元件，而不使用在稳定的供给和成本方面存在问题的铟，因为铟的量 由于需求紧张，资源量小，价格大幅上涨。

    Abnormality diagnosis apparatus for internal combustion engine
    9.
    发明授权
    Abnormality diagnosis apparatus for internal combustion engine 有权
    内燃机异常诊断装置

    公开(公告)号：US07832260B2

    公开(公告)日：2010-11-16

    申请号：US12194802

    申请日：2008-08-20

    Applicant: Toshihiko Tanaka

    Inventor： Toshihiko Tanaka

    IPC: G01M15/10

    CPC classification number: F02D41/222 ,  F02D35/027 ,  F02D41/0025 ,  F02D41/1495 ,  F02D41/2461 ,  F02D2041/228 ,  F02P5/1527 ,  Y02T10/36 ,  Y02T10/46

    Abstract: An abnormality diagnosis apparatus for an internal combustion engine includes an abnormality diagnosis unit, an other fuel contamination determination unit, and a misdiagnosis prohibition unit. The abnormality diagnosis unit determines whether there is an abnormality in a fuel system based on an output from an exhaust gas sensor mounted on an exhaust duct of the internal combustion engine. The other fuel contamination determination unit determines whether an other fuel contaminates a supply fuel supplied to the internal combustion engine. The misdiagnosis prohibition unit conducts one of (a) changing an abnormality determination condition for the abnormality diagnosis in the fuel system and (b) prohibiting the abnormality diagnosis in the fuel system, when the other fuel contamination determination unit determines that the other fuel contaminates the supply fuel.

    Abstract translation: 一种用于内燃机的异常诊断装置包括异常诊断单元，另一燃料污染确定单元和误诊禁止单元。 异常诊断单元基于安装在内燃机的排气管道上的排气传感器的输出，判定燃料系统是否存在异常。 另一个燃料污染确定单元确定其他燃料是否污染供应到内燃机的供应燃料。 误诊诊断单元进行以下（a）改变燃料系统的异常诊断的异常判定条件和（b）在燃料系统中禁止异常诊断的情况下，另一方的燃料污染判定单元判定另一方的燃料污染了 供应燃料。

    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    10.
    发明申请
    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号：US20100285409A1

    公开(公告)日：2010-11-11

    申请号：US12812435

    申请日：2008-12-09

    Applicant: Toshihiko Tanaka

    Inventor： Toshihiko Tanaka

    IPC: G03F7/20

    CPC classification number: H01L21/32139 ,  H01L21/0337 ,  H01L21/28123 ,  H01L21/823437 ,  H01L21/823475 ,  H01L21/823828 ,  H01L21/823871 ,  H01L27/0207 ,  H01L28/20 ,  H01L29/517 ,  H01L29/66545

    Abstract: A reverse pattern is formed once by combining a negative exposure mask having a wiring pattern with a positive resist, and then a positive wiring pattern is formed by use of the reverse pattern. That is, a positive resist applied on a semiconductor substrate is exposed by use of the exposure mask having an opening part in a region corresponding to the wiring pattern, and then the exposed part is removed by development to form a resist pattern, thereby forming the wiring pattern in the region corresponding to the opening part of the resist pattern. Consequently, it is hardly affected by flare during EUV exposure, thereby fabricating a fine wiring pattern with higher exposure latitude.

    Abstract translation: 通过将具有布线图案的负曝光掩模与正光刻胶组合一次形成反向图案，然后通过使用反向图案形成正布线图案。 也就是说，通过使用在与布线图案相对应的区域中具有开口部分的曝光掩模来曝光施加在半导体基板上的正光刻胶，然后通过显影除去曝光部分以形成抗蚀剂图案，从而形成 在与抗蚀剂图案的开口部对应的区域中的布线图案。 因此，在EUV曝光期间几乎不受光斑的影响，从而制造出具有较高曝光宽容度的精细布线图案。

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