Invention Grant
US07960770B2 Nonvolatile memory element array with storing layer formed by resistance variable layers
有权
具有由电阻变化层形成的存储层的非易失存储元件阵列
- Patent Title: Nonvolatile memory element array with storing layer formed by resistance variable layers
- Patent Title (中): 具有由电阻变化层形成的存储层的非易失存储元件阵列
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Application No.: US12445380Application Date: 2007-10-12
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Publication No.: US07960770B2Publication Date: 2011-06-14
- Inventor: Takumi Mikawa , Takeshi Takagi , Yoshio Kawashima , Koji Arita
- Applicant: Takumi Mikawa , Takeshi Takagi , Yoshio Kawashima , Koji Arita
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-281080 20061016
- International Application: PCT/JP2007/069966 WO 20071012
- International Announcement: WO2008/047711 WO 20080424
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A lower electrode (22) is provided on a semiconductor chip substrate (26). A lower electrode (22) is covered with a first interlayer insulating layer (27) from above. A first contact hole (28) is provided on the lower electrode (22) to penetrate through the first interlayer insulating layer (27). A low-resistance layer (29) forming the resistance variable layer (24) is embedded to fill the first contact hole (28). A high-resistance layer (30) is provided on the first interlayer insulating layer (27) and the low-resistance layer (29). The resistance variable layer (24) is formed by a multi-layer resistance layer including a single layer of the high-resistance layer (30) and a single layer of the low-resistance layer (29). The low-resistance layer (29) forming the memory portion (25) is isolated from at least its adjacent memory portion (25).
Public/Granted literature
- US20100090193A1 NONVOLATILE MEMORY ELEMENT ARRAY AND MANUFACTURING METHOD THEREOF Public/Granted day:2010-04-15
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