发明授权
- 专利标题: Nanotube growth and device formation
- 专利标题(中): 纳米管生长和器件形成
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申请号: US12198053申请日: 2008-08-25
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公开(公告)号: US07964174B2公开(公告)日: 2011-06-21
- 发明人: Valery M. Dubin , Juan E. Dominguez , Chin-Chang Cheng
- 申请人: Valery M. Dubin , Juan E. Dominguez , Chin-Chang Cheng
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: C01B31/02
- IPC分类号: C01B31/02
摘要:
An apparatus and method for forming catalyst particles to grow nanotubes is disclosed. In addition, an apparatus and method for forming nanotubes using the catalytic particles is also disclosed. The particles formed may have different diameters depending upon how they are formed. Once formed, the particles are deposited on a substrate. Once deposited, the mobility of the particles is restricted and nanotubes and/or nanotube portions are grown on the particles. Nanotube portions having different diameters may be formed and the portions may be connected to form nanotubes with different diameters along the length of the nanotube.
公开/授权文献
- US20080311400A1 NANOTUBE GROWTH AND DEVICE FORMATION 公开/授权日:2008-12-18
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