发明授权
US07969549B2 Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
有权
液体填充透镜元件，包括这种元件的光刻设备和器件制造方法
- 专利标题： Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
- 专利标题（中）： 液体填充透镜元件，包括这种元件的光刻设备和器件制造方法
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申请号： US11478307申请日： 2006-06-30
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公开(公告)号： US07969549B2公开(公告)日： 2011-06-28
- 发明人: Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
- 申请人： Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 主分类号： G03B27/52
- IPC分类号： G03B27/52
摘要：
A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
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