-
1.发明授权Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method 有权液体填充透镜元件，包括这种元件的光刻设备和器件制造方法公开(公告)号：US08237912B2
公开(公告)日：2012-08-07
申请号：US13043192
申请日：2011-03-08
申请人： Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
发明人： Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
IPC分类号： G03B27/52
CPC分类号： G03B27/522 , G03F7/70341 , G03F7/70808 , G03F7/70958
摘要： A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
摘要翻译： 用于投影系统的透镜元件包括凹面。 透镜元件还包括膜和喷嘴，所述膜至少覆盖透镜元件的凹面。 喷嘴布置成用于在凹面和膜之间提供和/或去除液体和/或气体。
-
2.发明授权Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method 有权液体填充透镜元件，包括这种元件的光刻设备和器件制造方法公开(公告)号：US07969549B2
公开(公告)日：2011-06-28
申请号：US11478307
申请日：2006-06-30
申请人： Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
发明人： Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
IPC分类号： G03B27/52
CPC分类号： G03B27/522 , G03F7/70341 , G03F7/70808 , G03F7/70958
摘要： A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
摘要翻译： 用于投影系统的透镜元件包括凹面。 透镜元件还包括膜和喷嘴，所述膜至少覆盖透镜元件的凹面。 喷嘴布置成用于在凹面和膜之间提供和/或去除液体和/或气体。
-
3.发明申请Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method 有权液体填充透镜元件，包括这种元件的光刻设备和器件制造方法公开(公告)号：US20080002168A1
公开(公告)日：2008-01-03
申请号：US11478307
申请日：2006-06-30
申请人： Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
发明人： Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
IPC分类号： G03B27/42
CPC分类号： G03B27/522 , G03F7/70341 , G03F7/70808 , G03F7/70958
摘要： A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
摘要翻译： 用于投影系统的透镜元件包括凹面。 透镜元件还包括膜和喷嘴，所述膜至少覆盖透镜元件的凹面。 喷嘴布置成用于在凹面和膜之间提供和/或去除液体和/或气体。
-
4.发明申请LIQUID FILLED LENS ELEMENT, LITHOGRAPHIC APPARATUS COMPRISING SUCH AN ELEMENT AND DEVICE MANUFACTURING METHOD 有权液体填充镜头元件，包含这些元件的平面设备和设备制造方法公开(公告)号：US20110194096A1
公开(公告)日：2011-08-11
申请号：US13043192
申请日：2011-03-08
申请人： Herman BOOM , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
发明人： Herman BOOM , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
CPC分类号： G03B27/522 , G03F7/70341 , G03F7/70808 , G03F7/70958
摘要： A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
摘要翻译： 用于投影系统的透镜元件包括凹面。 透镜元件还包括膜和喷嘴，所述膜至少覆盖透镜元件的凹面。 喷嘴布置成用于在凹面和膜之间提供和/或去除液体和/或气体。
-
-
-
搜索结果
4 条记录 (耗时 0.018 秒)
