Invention Grant
- Patent Title: Method and apparatus for probe card alignment in a test system
- Patent Title (中): 测试系统中探针卡校准的方法和设备
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Application No.: US12431271Application Date: 2009-04-28
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Publication No.: US07977956B2Publication Date: 2011-07-12
- Inventor: Keith J. Breinlinger , Benjamin N. Eldridge , Eric D. Hobbs , Douglas S. Ondricek
- Applicant: Keith J. Breinlinger , Benjamin N. Eldridge , Eric D. Hobbs , Douglas S. Ondricek
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kirton & McConkie
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/20

Abstract:
Embodiments of methods and apparatus for aligning a probe card assembly in a test system are provided herein. In some embodiments, an apparatus for testing devices may include a probe card assembly having a plurality of probes, each probe having a tip for contacting a device to be tested, and having an identified set of one or more features that are preselected in accordance with selected criteria for aligning the probe card assembly within a prober after installation therein. In some embodiments, the identity of the identified set of one or more features may be communicated to the prober to facilitate a global alignment of the probe card assembly that minimizes an aggregate misalignment of all of the tips in the probe card assembly.
Public/Granted literature
- US20100271062A1 METHOD AND APPARATUS FOR PROBE CARD ALIGNMENT IN A TEST SYSTEM Public/Granted day:2010-10-28
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