发明授权
- 专利标题: Surface-emitting type semiconductor laser that controls polarization directions of laser light and method for manufacturing the same
- 专利标题(中): 控制激光的偏振方向的表面发射型半导体激光器及其制造方法
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申请号: US12502748申请日: 2009-07-14
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公开(公告)号: US07983319B2公开(公告)日: 2011-07-19
- 发明人: Hitoshi Nakayama , Tsugio Ide , Tsuyoshi Kaneko
- 申请人: Hitoshi Nakayama , Tsugio Ide , Tsuyoshi Kaneko
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge PLC
- 优先权: JP2003-326296 20030918
- 主分类号: H01S5/42
- IPC分类号: H01S5/42 ; H01S5/16
摘要:
To provide surface-emitting type semiconductor lasers and methods of manufacturing the same in which the polarization direction of laser light can be readily controlled, a surface-emitting type semiconductor laser includes a vertical resonator above a substrate. The vertical resonator includes a first mirror, an active layer and a second mirror disposed in this order from the substrate. The vertical resonator has a plurality of unit resonators. An emission region of each of the unit resonators has a diameter that oscillates in a single-mode.
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