Invention Grant
- Patent Title: Corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial, chromatic aberration
- Patent Title (中): 纠正消除三阶孔径像差和一级,一度轴向色差
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Application No.: US12096579Application Date: 2005-12-06
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Publication No.: US07989776B2Publication Date: 2011-08-02
- Inventor: Heiko Müller , Harald Rose
- Applicant: Heiko Müller , Harald Rose
- Applicant Address: DE Heidelberg
- Assignee: CEOS Corrected Electron Optical Systems GmbH
- Current Assignee: CEOS Corrected Electron Optical Systems GmbH
- Current Assignee Address: DE Heidelberg
- Agent Paul Vincent
- International Application: PCT/DE2005/002210 WO 20051206
- International Announcement: WO2007/065382 WO 20070614
- Main IPC: H01J1/50
- IPC: H01J1/50

Abstract:
A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the other in the direction of the optical axis, in which each correction piece has a plurality of quadrupole fields (QP) and at least one octupole field (OP.) Each correction piece is constructed such that it is symmetrical with respect to its central plane (S, S′) with each correction piece having an uneven number of at least five quadrupole fields (QP) and at least one octupole field (OP). Each correction piece is further constructed so that it is symmetrical with respect to its central plane. The central quadrupole field is arranged so that it is centered with respect to the central plane of the correction piece and is electromagnetic. The quadrupole fields of the two correction pieces are antisymmetrical and a transfer lens system is arranged such that it is symmetrical with respect to the central plane of the corrective between the correction pieces. The transfer lens system has two round lenses and the setting of the transfer lens system takes place so that the two round lenses image the central plane of the two correction pieces anamorphically onto one another, in which the enlargement in one main section is the reciprocal of the enlargement in the other main section and with an octupole field superimposed on the central quadrupole field.
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