公开(公告)号：US07973289B2

公开(公告)日：2011-07-05

申请号：US12405279

申请日：2009-03-17

申请人： Joachim Zach ,  Harald Rose

发明人： Joachim Zach ,  Harald Rose

IPC分类号： G01N23/00

CPC分类号： H01J37/263 ,  H01J2237/2614

摘要： According to the invention, the image contrast in electron optics can be improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least one anamorphic image, quadrupole fields before and after this image whose extent in the direction of the optical axis is equal to at least twice their focal length, and wherein at least one of the axial rays, by an appropriate choice of the magnification M of the intermediate image, enters the quadrupole field before the at least one anamorphic image at a slope 1/M such that a length of the anamorphic image is achieved at which any aberrations caused are still within a tolerable range. The invention also relates to devices for implementing this method.

摘要翻译： 根据本发明，可以改善电子光学中的图像对比度，而不会引起不能容忍的像差，用于生成和校正至少一个变形图像，该图像之前和之后的四极场的程度在 光轴等于其焦距的至少两倍，并且其中通过适当选择中间图像的放大率M的轴向光线中的至少一个在斜率的至少一个变形图像之前进入四极场 1 / M，使得实现了导致任何像差的变形图像的长度仍然在可容许的范围内。 本发明还涉及用于实现该方法的装置。

公开(公告)号：US20090084975A1

公开(公告)日：2009-04-02

申请号：US12232638

申请日：2008-09-22

申请人： Joachim Zach ,  Matthias Kallenbach

发明人： Joachim Zach ,  Matthias Kallenbach

IPC分类号： H01J3/14

CPC分类号： H01J1/50 ,  H01F5/003 ,  H01J29/762 ,  H01J29/768 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/141 ,  H05K1/0393 ,  H05K1/165 ,  Y10T29/4902

摘要： Multipole coils (1, 2, 3, 4, 5, 6) for influencing particle beams have at least two coils (1, 2) which concentrically enclose an imaginary axis (10), wherein a winding (7) made from a flexible circuit board (8) is formed by means of conducting paths (9) disposed thereon for each coil (1, 2, 3, 4, 5, 6) and the circuit boards (8) are rolled into at least one circuit board layer (11, 12, 13, 14). Multipole coils of this kind (1, 2, 3, 4, 5, 6) are utilized for aberration correction in particle optics, wherein the windings (7) of the multipole coils (1, 2, 3, 4, 5, 6) form windows (16) whose width in the peripheral direction is chosen in such a fashion that no secondary interfering fields occur and whose length in the axial direction corresponds at least to its width.

摘要翻译： 用于影响粒子束的多极线圈（1,2,3,4,5,6）具有至少两个同心地围绕虚轴（10）的线圈（1,2），其中由柔性电路制成的绕组（7） 板（8）通过为每个线圈（1,2,3,4,5,6）设置在其上的导电路径（9）形成，并且电路板（8）被卷入至少一个电路板层（11 ，12,13,14）。 这种多极线圈（1,2,3,4,5,6）用于粒子光学中的像差校正，其中多极线圈（1,2,3,4,5,6）的绕组（7） 选择圆周方向宽度的窗口（16），使得不产生二次干涉场，并且其在轴向上的长度至少等于其宽度。

公开(公告)号：US20080290273A1

公开(公告)日：2008-11-27

申请号：US12153455

申请日：2008-05-20

申请人： Stephan Uhlemann

发明人： Stephan Uhlemann

IPC分类号： H01J47/00

CPC分类号： H01J37/153 ,  H01J37/05 ,  H01J37/26 ,  H01J49/48 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/1538

摘要： A monochromator (1) for a charged particle optics, in particular, for electron microscopy, comprises at least one first deflection element (2, 3) with an electrostatic deflecting field (2′, 3′) for generating a dispersion (4) in the plane (5) of a selection aperture (6) to select charged particles of a desired energy interval (7) and at least one second deflection element (8, 9) with an electrostatic deflecting field (8′, 9′) which eliminates the dispersion (4) of the at least one first deflecting field (2′, 3′). A radiation source (17) comprises such a monochromator (1). High monchromatism without intensity contrasts caused by defects of the slit aperture is thereby achieved in that the deflection elements (2, 3, 8, 9) have a design other than spherically shaped and their electrodes (24, 25) are given a potential (φ+, φ−) such that the charged particles (xα, yβ) which virtually enter the image of the radiation source (17) at different respective angles (α, β) in different sections (x, y), are differently focused such that charged particles (xα, yβ) of one energy are point focused (10, 10′, 10″) exclusively in the plane (5) of the selection aperture (6), since zero-crossings (11, 12) of the deflections (A) of the charged particles (xα, yβ) of the different sections (x, y) only coincide there at the same axial position (z, E).

摘要翻译： 用于带电粒子光学器件的单色仪（1），特别是用于电子显微镜的装置包括至少一个具有用于产生分散体（4）的静电偏转场（2'，3'）的第一偏转元件（2,3） 选择孔径（6）的平面（5）以选择具有期望能量间隔（7）的带电粒子和至少一个具有静电偏转场（8'，9'）的第二偏转元件（8,9） 所述至少一个第一偏转场（2'，3'）的色散（4）。 辐射源（17）包括这样的单色仪（1）。 因此，由于偏转元件（2,3,8,9）具有除球形之外的设计，并且它们的电极（24,25）被赋予电位（phi + ，phi），使得在不同部分（x，y）中以不同的相应角度（α，β）实际进入辐射源（17）的图像的带电粒子（xalpha，ybeta）被不同地聚焦，使得带电 一个能量的粒子（xalpha，ybeta）专门在选择孔径（6）的平面（5）中点聚焦（10,10'，10“），因为偏转的零交叉（11,12） A）的不同部分（x，y）的带电粒子（xalpha，ybeta）仅在相同的轴向位置（z，E）处重合。

公开(公告)号：US07989776B2

公开(公告)日：2011-08-02

申请号：US12096579

申请日：2005-12-06

申请人： Heiko Müller ,  Harald Rose

发明人： Heiko Müller ,  Harald Rose

IPC分类号： H01J1/50

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1534

摘要： A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the other in the direction of the optical axis, in which each correction piece has a plurality of quadrupole fields (QP) and at least one octupole field (OP.) Each correction piece is constructed such that it is symmetrical with respect to its central plane (S, S′) with each correction piece having an uneven number of at least five quadrupole fields (QP) and at least one octupole field (OP). Each correction piece is further constructed so that it is symmetrical with respect to its central plane. The central quadrupole field is arranged so that it is centered with respect to the central plane of the correction piece and is electromagnetic. The quadrupole fields of the two correction pieces are antisymmetrical and a transfer lens system is arranged such that it is symmetrical with respect to the central plane of the corrective between the correction pieces. The transfer lens system has two round lenses and the setting of the transfer lens system takes place so that the two round lenses image the central plane of the two correction pieces anamorphically onto one another, in which the enlargement in one main section is the reciprocal of the enlargement in the other main section and with an octupole field superimposed on the central quadrupole field.

摘要翻译： 用于消除三次孔径像差和一级一级轴向色差的校正方法包括两个校正片，其在光轴方向上一个接一个布置，其中每个校正片具有多个 四极场（QP）和至少一个八极场（OP）。每个校正片被构造成使得它相对于其中心平面（S，S'）是对称的，每个校正片具有不均匀数量的至少五个 四极场（QP）和至少一个八极场（OP）。 每个校正件进一步构造成使得它相对于其中心平面是对称的。 中心四极场被布置为使得其相对于校正件的中心平面居中并且是电磁的。 两个校正块的四极场是反对称的，并且转印透镜系统被布置成使得其相对于校正片之间的校正的中心平面对称。 转印透镜系统具有两个圆形透镜，并且传送透镜系统的设置发生，使得两个圆形透镜彼此变形地将两个校正片的中心平面成像，其中一个主要部分的放大是 另一个主要部分的放大和一个叠加在中心四极场上的八极场。

公开(公告)号：US07807965B2

公开(公告)日：2010-10-05

申请号：US12230632

申请日：2008-09-03

申请人： Joachim Zach ,  Harald Rose

发明人： Joachim Zach ,  Harald Rose

IPC分类号： H01J37/153 ,  H01J37/26 ,  G21K1/08

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1534

摘要： A corrector (1) for the axial and off-axial beam path of a particle-optical system, comprises a first (10) and a second (20) correction piece, which are disposed one behind the other in the beam path (2) on an optical axis (3). Each correction piece (10, 20) comprises four successive multipole elements (11, 12, 13, 14; 24, 23, 22, 21) disposed symmetrically with respect to a center plane (5) and with the following fields: wherein the first (11; 24) and the fourth (14; 21) multipole elements of the multipole elements (11, 12, 13, 14; 24, 23, 22, 21) are used to generate quadrupole fields (11′, 14′; 24′, 21′) and the second (12; 23) and third (13; 22) are used to generate octupole fields (12′″, 13′″; 23′″,22′″) and quadrupole fields (12′, 13′; 23′,22′), wherein the latter are superposed magnetic (12′, 13′; 23′, 22′) and electric fields (12″, 13″; 23″, 22″), wherein the quadrupole fields (11′, 12′, 13′, 14′; 24′, 23′, 22′, 21′) of all four multipole elements (11, 12, 13, 14; 24, 23, 22,21) are rotated from one to the next through 90°. An astigmatism of third order is corrected by a central multipole element disposed in the center plane and generating an octupole field.

摘要翻译： 一种用于粒子光学系统的轴向和非轴向光束路径的校正器（1）包括在光束路径（2）中一个在另一个之后设置的第一（10）和第二（20）校正片， 在光轴（3）上。 每个校正件（10,20）包括相对于中心平面（5）对称设置的四个连续的多极元件（11,12,13,14，24,23,22,21），并具有以下场：其中第一 （11; 24）和多极元件（11,12,13,14; 24,23,22,21）的第四（14; 21）多极元件用于产生四极场（11'，14'; 24 '，21'）和第二（12; 23）和第三（13; 22）用于产生八极场（12“，13”“23”“22”“）和四极场（12' 13'; 23'，22'），其中后者是重叠的磁（12'，13'; 23'，22'）和电场（12“，13”; 23“，22”），其中四极场 所有四个多极元件（11,12,13,14; 24,23,22,21）的所述四个多极元件（11,12,13,14; 24,23,22,21）的所述四个多极元件（11'，12'，13'，14'; 24'，23'，22'，21' 一个到下一个到90°。 通过设置在中心平面中的中心多极元件校正三阶散光并产生八极场。

公开(公告)号：US07781742B2

公开(公告)日：2010-08-24

申请号：US12213493

申请日：2008-06-20

申请人： Joachim Zach

发明人： Joachim Zach

IPC分类号： H01J37/153 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/153 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/2802

摘要： The invention concerns a corrector (10) for chromatic and aperture aberration correction in a scanning electron microscope or a scanning transmission electron microscope, comprising four multipole elements (1, 2, 3, 4) which are consecutively disposed in the optical path (9), the first (1) and fourth (4) of which are used to generate quadrupole fields (5, 6) and the second (2) and third (3) of which are used to generate octupole fields (11, 12) and quadrupole fields (7, 7′, 8, 8′), wherein the latter are superposed magnetic (7, 8) and electric (7′, 8′) fields, and wherein the quadrupole fields (5, 6, 7, 8) of all four multipole elements (1, 2, 3, 4) are successively rotated with respect to one another through 90°. Elimination of errors up to fifth order can be realized with a corrector (10) of this type in that the second (2) and the third (3) multipole elements are designed as twelve-pole elements, and an additional twelve-pole element (13) is inserted between the second (2) and the third (3) multipole element, and is loaded with current and/or voltage, such that an octupole field (14) is generated that is superposed by a twelve-pole field (15).

摘要翻译： 本发明涉及一种用于扫描电子显微镜或扫描透射电子显微镜中的彩色和孔径像差校正的校正器（10），包括连续设置在光路（9）中的四个多极元件（1,2,3,4） ，其第一（1）和第四（4）用于产生四极场（5,6）和第二（2）和第三（3）用于产生八极场（11,12）和四极杆 （7,7'，8,8'），其中后者是重叠的磁（7,8）和电（7'，8'）场，并且其中四极场（5,6,7,8） 所有四个多极元件（1,2,3,4）相对于彼此依次旋转90°。 可以用这种校正器（10）来实现高达五级的误差的消除，因为第二（2）和第三（3）多极元件被设计为十二极元件和另外的十二极元件 13）插入在第二（2）和第三（3）多极元件之间，并且被加载电流和/或电压，使得产生由十二极场（15）叠加的八极场（14） ）。

公开(公告)号：US11081313B2

公开(公告)日：2021-08-03

申请号：US16932711

申请日：2020-07-18

申请人： CEOS Corrected Electron Optical Systems GmbH

发明人： Stephan Uhlemann

IPC分类号： H01J37/153 ,  H01J37/26

摘要： A corrector has a strength of a central hexapole field (ΨHP2) which is selected such that the threefold axial astigmatism (A2) vanishes and the strengths of two equal outer hexapole fields (ΨHP1,3) are selected such that the overall corrector (5) does not have a sixfold axial astigmatism (A5). The length (L) of the central multipole element (2) in relation to the lengths (L′) of the multipole elements (1 and 3) is chosen such that the axial three-lobed aberration of sixth order (D6) vanishes. A separation between the outer multipole elements (1 and 3) and round lenses (7″, 8″) further spaced apart from a symmetry plane (6) of the corrector corresponds to the focal length (f′) of those round lenses (7″, 8″) plus an additional separation (Δz) which is chosen such that the axial three-lobed aberration of fourth order (D4) vanishes for the given lengths L and L′.

公开(公告)号：US20090146056A1

公开(公告)日：2009-06-11

申请号：US12230632

申请日：2008-09-03

申请人： Joachim Zach ,  Harald Rose

发明人： Joachim Zach ,  Harald Rose

IPC分类号： G01N23/00

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1534

摘要： A corrector (1) for the axial and off-axial beam path of a particle-optical system, comprises a first (10) and a second (20) correction piece, which are disposed one behind the other in the beam path (2) on an optical axis (3). Each correction piece (10, 20) comprises four successive multipole elements (11, 12, 13, 14; 24, 23, 22, 21) disposed symmetrically with respect to a center plane (5) and with the following fields: wherein the first (11; 24) and the fourth (14; 21) multipole elements of the multipole elements (11, 12, 13, 14; 24, 23, 22, 21) are used to generate quadrupole fields (11′, 14′; 24′, 21′) and the second (12; 23) and third (13; 22) are used to generate octupole fields (12′″, 13′″;23′″,22′″) and quadrupole fields (12′, 13′; 23′,22′), wherein the latter are superposed magnetic (12′, 13′; 23′, 22′) and electric fields (12″, 13″; 23″, 22″), wherein the quadrupole fields (11′, 12′, 13′, 14′; 24′, 23′, 22′, 21′) of all four multipole elements (11, 12, 13, 14; 24, 23, 22,21) are rotated from one to the next through 90°. An astigmatism of third order is corrected by a central multipole element disposed in the center plane and generating an octupole field.

摘要翻译： 一种用于粒子光学系统的轴向和非轴向光束路径的校正器（1）包括在光束路径（2）中一个在另一个之后设置的第一（10）和第二（20）校正片， 在光轴（3）上。 每个校正件（10,20）包括相对于中心平面（5）对称设置的四个连续的多极元件（11,12,13,14，24,23,22,21），并具有以下场：其中第一 （11; 24）和多极元件（11,12,13,14; 24,23,22,21）的第四（14; 21）多极元件用于产生四极场（11'，14'; 24 '，21'）和第二（12; 23）和第三（13; 22）用于产生八极场（12“'，13”'，23“'，22”'）和四极场 （12'，13'; 23'，22'），其中后者是重叠的磁体（12'，13'; 23'，22'）和电场（12“，13”; 23“，22' “），其中所有四个多极元件（11,12,13,14; 24,23）的四极场（11'，12'，13'，14'; 24'，23'，22'，21' ，22,21）从一个向下旋转90°。 通过设置在中心平面中的中心多极元件校正三阶散光并产生八极场。

公开(公告)号：US20090079531A1

公开(公告)日：2009-03-26

申请号：US12216857

申请日：2008-07-11

申请人： Joachim Zach ,  Matthias Kallenbach

发明人： Joachim Zach ,  Matthias Kallenbach

IPC分类号： H01F5/00 ,  H01F7/06 ,  H01F7/127

CPC分类号： H01J1/50 ,  H01F5/003 ,  H01J29/762 ,  H01J29/768 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/141 ,  H05K1/0393 ,  H05K1/165 ,  Y10T29/4902

摘要： Multipole coils (1, 2, 3, 4, 5, 6) comprise at least two coils (1, 2) which are disposed to concentrically enclose an imaginary axis (10). Multipole coils (1, 2, 3, 4, 5, 6) of this type are designed in such a fashion that effective fields can be generated in the area of an imaginary axis (10) when little installation space is available, and the multipole coils can be reproducibly manufactured with high precision. This is achieved in that, for each coil (1, 2, 3, 4, 5, 6), at least one winding (7) is disposed on a flexible printed circuit board (8) through disposed strip conductors (9), and the printed circuit board (8) is rolled in at least one printed circuit board layer (11, 12, 13, 14).

摘要翻译： 多极线圈（1，2，3，4，5，6）包括至少两个线圈（1,2），其被设置成同心地包围虚轴（10）。 这种类型的多极线圈（1，2，3，4，5，6）被设计成这样一种方式，即在少的安装空间可用时，在虚轴（10）的区域中可以产生有效的场，而多极线圈 线圈可以高精度地重复制造。 这是通过对于每个线圈（1,2,3,4,5,6）实现的，至少一个绕组（7）通过设置的带状导体（9）设置在柔性印刷电路板（8）上，并且 印刷电路板（8）被卷绕在至少一个印刷电路板层（11,12,13,14）中。

公开(公告)号：US08314402B2

公开(公告)日：2012-11-20

申请号：US12929769

申请日：2011-02-15

申请人： Joachim Zach

发明人： Joachim Zach

IPC分类号： G21K1/08

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1534

摘要： The invention concerns a corrector (9) for chromatic and aperture aberration correction in an electron microscope with six multipoles (1, 2, 3, 4, 5, 6) which are disposed in the optical path (7) one after the other symmetrically with respect to a symmetry plane (8) for generating quadrupole fields (1′, 2′, 3′, 4′, 5′, 6′) and octupole fields, wherein the quadrupole fields (1′, 2′, 3′, 4′, 5′, 6′) of all six multipoles (1, 2, 3, 4, 5, 6) are consecutively rotated through 90° with respect to one another, thereby generating a mirror-symmetrical exchange symmetry of the axial fundamental rays (xα, yβ).In accordance with the invention, the following is provided for correcting azimuthal coma: A double multipole (10) with a multipole element (11) upstream of the symmetry plane (8) and a multipole element (12) downstream of the symmetry plane (8), which generates two octupole fields (11′, 12′) of the same orientation as the quadrupole fields (1′, 2′, 3′, 4′, 5′, 6′) and two further octupole fields (11″, 12″), which have opposite poles and exert a force on the electrons in a direction rotated through 90° with respect to the above-mentioned octupole fields (11′, 12′) in the principal sections (x, y). The six multipoles (1, 2, 3, 4, 5, 6) generate octupole fields (1″, 2″, 3″, 4″, 5″, 6″) with the same orientation, and the adjustment of the poles and of the field strengths of the octupole fields (1″, 2″, 3″, 4″, 5″, 6″, 1″, 12″) is used for the above-mentioned correction.

摘要翻译： 本发明涉及一种用于具有六个多极（1,2,3,4,5,6）的电子显微镜中的彩色和孔径像差校正的校正器（9），它们一个接一个地对准地设置在光路（7）中， 相对于用于产生四极场（1'，2'，3'，4'，5'，6'）和八极场的对称平面（8），其中四极场（1'，2'，3'，4 所有六个多极（1,2,3,4,5,6）的“5”，6“）相对于彼此连续旋转90°，从而产生轴向基本射线的镜对称交换对称性 （xα，y＆bgr）。 根据本发明，提供以下用于校正方位角彗差：具有在对称平面（8）上游的多极元件（11）的双重多极（10）和在对称平面（8）的下游的多极元件（12） ），其产生与四极场（1'，2'，3'，4'，5'，6'）相同取向的两个八极场（11'，12'）和两个另外的八极场（11“， 12“），它们具有相反的极点并在相对于主要部分（x，y）中的上述八极场（11'，12'）旋转90°的方向上对电子施加力。 六个多极（1,2,3,4,5,6）产生具有相同取向的八极场（1“，2”，3“，4”，5“，6”），并且极和 对于上述校正，使用八极场（1“，2”，3“，4”，5“，6”，1“，12”）的场强。