Invention Grant
- Patent Title: CMOS image sensor and manufacturing method thereof
- Patent Title (中): CMOS图像传感器及其制造方法
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Application No.: US12437373Application Date: 2009-05-07
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Publication No.: US07994554B2Publication Date: 2011-08-09
- Inventor: Chang Hun Han
- Applicant: Chang Hun Han
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2005-0063732 20050714
- Main IPC: H01L23/02
- IPC: H01L23/02

Abstract:
Disclosed are a CMOS image sensor and a manufacturing method thereof. The method includes the steps of: forming an isolation layer on a semiconductor substrate, defining an active region that includes a photo diode region and a transistor region; forming a gate in the transistor region, the gate including a gate electrode and a gate insulating layer; forming a first low-concentration diffusion region in the photo diode region; forming a second low-concentration diffusion region in the transistor region; forming a buffer layer over the substrate, the buffer layer covering the photo diode region; forming first and second insulating layers over the entire surface of the substrate, the first and second insulating layer having a different etching selectivity from each other; forming an insulating sidewall on sides of the gate electrode by selective removal of the second insulating layer; removing the first insulating layer from the transistor region; forming a high-concentration diffusion region in the exposed transistor region, partially overlapping the second low-concentration diffusion region; and forming a metal silicide layer on the high-concentration diffusion region.
Public/Granted literature
- US20090224298A1 CMOS Image Sensor and Manufacturing Method Thereof Public/Granted day:2009-09-10
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