发明授权
- 专利标题: Method of manufacturing a TFT array panel
- 专利标题(中): 制造TFT阵列面板的方法
-
申请号: US12369839申请日: 2009-02-12
-
公开(公告)号: US07998786B2公开(公告)日: 2011-08-16
- 发明人: Je-Hun Lee , Jae-Kyeong Lee , Chang-Oh Jeong , Beom-Seok Cho
- 申请人: Je-Hun Lee , Jae-Kyeong Lee , Chang-Oh Jeong , Beom-Seok Cho
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Cantor Colburn LLP
- 优先权: KR10-2004-0007678 20040205
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Multi-layered wiring for a larger flat panel display is formed by depositing molybdenum on a substrate in presence of a precursor gas containing at least one oxygen, nitrogen and carbon to form a molybdenum layer. An aluminum layer is deposited on the molybdenum layer. Another metal layer may be formed on the aluminum layer. The molybdenum layer has a face-centered cubic (FCC) lattice structure with a preferred orientation of (111).
公开/授权文献
- US20090163022A1 TFT ARRAY PANEL 公开/授权日:2009-06-25