发明授权
- 专利标题: Method for fabricating semiconductor device having vertical gate
- 专利标题(中): 制造具有垂直栅极的半导体器件的方法
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申请号: US12494782申请日: 2009-06-30
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公开(公告)号: US07998816B2公开(公告)日: 2011-08-16
- 发明人: Young-Kyun Jung
- 申请人: Young-Kyun Jung
- 申请人地址: KR Gyeonggi-do
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: IP & T Group LLP
- 优先权: KR10-2008-0138589 20081231
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method for fabricating a semiconductor device includes forming buried bit lines separated from each other by a trench in a substrate, forming a plurality of first pillar holes that expose a top surface of the substrate, forming first active pillars buried in the first pillar holes, forming a gate conductive layer over entire surface of a resultant structure including the first active pillars, forming a gate electrode by etching the gate conducting layer to cover the first active pillars, forming a plurality of second pillar holes that expose the first active pillars by partially etching the gate electrode, and forming second active pillars buried in the second pillar holes and connected to the first active pillars.
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