Invention Grant
US08018586B2 Metrology of thin film devices using an addressable micromirror array
有权
使用可寻址微镜阵列的薄膜器件的测量
- Patent Title: Metrology of thin film devices using an addressable micromirror array
- Patent Title (中): 使用可寻址微镜阵列的薄膜器件的测量
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Application No.: US12388173Application Date: 2009-02-18
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Publication No.: US08018586B2Publication Date: 2011-09-13
- Inventor: Edgar Genio , Edward W. Budiarto
- Applicant: Edgar Genio , Edward W. Budiarto
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Robert M. Wallace
- Main IPC: G01N21/00
- IPC: G01N21/00
Abstract:
An addressable micromirror array is employed in conjunction with circuit topology navigation software to rapidly wavelength sample selected measurement points in an integrated circuit region.
Public/Granted literature
- US20100106456A1 METROLOGY OF THIN FILM DEVICES USING AN ADDRESSABLE MICROMIRROR ARRAY Public/Granted day:2010-04-29
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