发明授权
- 专利标题: Coaxial shafts for radial positioning of rotating magnetron
- 专利标题(中): 用于旋转磁控管径向定位的同轴轴
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申请号: US11924573申请日: 2007-10-25
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公开(公告)号: US08021527B2公开(公告)日: 2011-09-20
- 发明人: Keith A. Miller , Michael Allen Flanigan , Hari Ponnekanti
- 申请人: Keith A. Miller , Michael Allen Flanigan , Hari Ponnekanti
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理商 Charles S. Guenzer
- 主分类号: C25B9/00
- IPC分类号: C25B9/00 ; C25B11/00 ; C25B13/00 ; C23C14/00
摘要:
A magnetron actuator for moving a magnetron in a nearly arbitrary radial and azimuthal path in the back of a target in a plasma sputter reactor. The magnetron includes two coaxial rotary shafts extending along the chamber central axis and coupled to two independently controllable rotary actuators. An epicyclic gear mechanism or a frog-leg structure mechanically couple the shafts to the magnetron to control its radial and azimuthal position. A vertical actuator moves the shafts vertically in tandem to vary the magnetron's separation from the target's back surface and compensate for erosion of the front surface. The rotary actuators may be separately coupled to the shafts or a rotatable ring gear may be coupled to the shafts through respectively fixed and orbiting idler gears. Two radially spaced sensors detect reflectors attached to the inner and outer arms of the epicyclic gear mechanism for homing of the controller.
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