发明授权
- 专利标题: Electroforming mold and method for manufacturing the same, and method for manufacturing electroformed component
- 专利标题(中): 电铸模具及其制造方法以及电铸部件的制造方法
-
申请号: US12657150申请日: 2010-01-14
-
公开(公告)号: US08021534B2公开(公告)日: 2011-09-20
- 发明人: Takashi Niwa , Susumu Ichihara , Koichiro Jujo , Hiroyuki Hoshina
- 申请人: Takashi Niwa , Susumu Ichihara , Koichiro Jujo , Hiroyuki Hoshina
- 申请人地址: JP
- 专利权人: Seiko Instruments Inc.
- 当前专利权人: Seiko Instruments Inc.
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 主分类号: C25D1/00
- IPC分类号: C25D1/00 ; G03F7/20
摘要:
To provide an electroforming mold for manufacturing a multi-step structure minute component and a method for manufacturing the same, for which height control is possible and manufacturing process does not become complicated. On the upper face of a film of an electroconductive layer 2 formed on the upper face of a substrate 1, a resist 3 is formed in which a first soluble portion 3b and a first insoluble portion 3a are formed. Next, a light-absorbing body 10 is formed on the upper face of the resist, exposure and development are carried out, in addition a film of an electroconductive layer 2 is formed on the upper face thereof, and a light-absorbing body 10 and an electroconductive layer 5 on the upper face of the light-absorbing body 10 are removed by liftoff. Further, a resist is formed on the upper face thereof, in which a second soluble portion 6b and a second insoluble portion 6a are formed. Next, the first resist and the second resist are developed to remove the first soluble portion 3b and the second soluble portion 6b, thereby giving an electroforming mold 101 having an electroconductive layer on the basal part of respective steps.
公开/授权文献
信息查询