发明授权
US08033180B2 Flow sensor apparatus and method with media isolated electrical connections
有权
具有介质隔离电气连接的流量传感器装置和方法
- 专利标题: Flow sensor apparatus and method with media isolated electrical connections
- 专利标题(中): 具有介质隔离电气连接的流量传感器装置和方法
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申请号: US12779657申请日: 2010-05-13
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公开(公告)号: US08033180B2公开(公告)日: 2011-10-11
- 发明人: Gilberto Morales , Carl Stewart , Scott Edward Beck , Richard Alan Davis
- 申请人: Gilberto Morales , Carl Stewart , Scott Edward Beck , Richard Alan Davis
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理机构: Seager, Tufte and Wickham, LLC
- 主分类号: G01L7/00
- IPC分类号: G01L7/00
摘要:
A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.