Invention Grant
- Patent Title: Method of preventing abnormal large grains from being included into thin nano-crystalline diamond film
- Patent Title (中): 防止异常大颗粒纳入薄纳米晶金刚石薄膜的方法
-
Application No.: US11931963Application Date: 2007-10-31
-
Publication No.: US08034411B2Publication Date: 2011-10-11
- Inventor: Heqing Li , Wook Seong Lee , Young Joon Baik , Jong-Keuk Park
- Applicant: Heqing Li , Wook Seong Lee , Young Joon Baik , Jong-Keuk Park
- Applicant Address: KR
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR
- Agency: Baker & Hostetler LLP
- Priority: KR10-2007-0093541 20070914
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/26 ; C23C16/52
Abstract:
The present invention relates to a method of preventing abnormal large grains from being included in a NCD thin film during a hot filament CVD process by appropriately controlling the deposition condition regarding a temperature-measuring means, a deposition pressure, an electrical potential and/or the composition of a raw material gas flow.
Public/Granted literature
- US20090074986A1 METHOD OF PREVENTING ABNORMAL LARGE GRAINS FROM BEING INCLUDED INTO THIN NANO-CRYSTALLINE DIAMOND FILM Public/Granted day:2009-03-19
Information query
IPC分类:
