发明授权
- 专利标题: Resonant circuit, method of producing same, and electronic device
- 专利标题(中): 共振电路,制造方法和电子设备
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申请号: US12486669申请日: 2009-06-17
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公开(公告)号: US08035462B2公开(公告)日: 2011-10-11
- 发明人: Toru Watanabe
- 申请人: Toru Watanabe
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Kilpatrick Townsend & Stockton LLP
- 优先权: JP2008-158847 20080618; JP2009-075911 20090326
- 主分类号: H03H9/125
- IPC分类号: H03H9/125 ; H03H9/24 ; H03H3/007 ; H03B7/06
摘要:
A resonant circuit includes a substrate; a MEMS resonator including a fixed electrode and a movable electrode formed above the substrate and having a first terminal and a second terminal, the movable electrode having a movable portion opposing at least a part of the fixed electrode; and a voltage applying unit applying a bias voltage to the MEMS resonator, the voltage applying unit including a voltage divider circuit that includes a compensation resistance formed of a same layer as that of the movable portion to allow a resistance value to be changed by a thickness of the layer and a reference resistance formed of a layer different from that of the movable portion and connected to the compensation resistance to output a junction potential between the compensation resistance and the reference resistance to at least one of the first and the second terminals of the MEMS resonator.
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