发明授权
- 专利标题: Method for bonding semiconductor wafers and method for manufacturing semiconductor device
- 专利标题(中): 半导体晶片的接合方法及半导体装置的制造方法
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申请号: US12597652申请日: 2008-04-24
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公开(公告)号: US08039305B2公开(公告)日: 2011-10-18
- 发明人: Kenzou Mejima , Satoru Katsurayama , Mitsuo Sugino
- 申请人: Kenzou Mejima , Satoru Katsurayama , Mitsuo Sugino
- 申请人地址: JP Tokyo
- 专利权人: Sumitomo Bakelite Company, Ltd.
- 当前专利权人: Sumitomo Bakelite Company, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2007-119948 20070427; JP2007-142436 20070529; JP2007-154250 20070611
- 国际申请: PCT/JP2008/057934 WO 20080424
- 国际公布: WO2008/136352 WO 20081113
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
In a method for bonding semiconductor wafers of the present invention, a bonding layer containing a flux-active curing agent and a thermosetting resin is interposed between a first semiconductor wafer and a second semiconductor wafer, thereby producing a semiconductor wafer stacked body in which the first and second semiconductor wafers are stacked together, and then the semiconductor wafer stacked body is compressed in a thickness direction thereof while heating it so that the first and second semiconductor wafers are fixed together by melting and solidifying solder bumps while curing the thermosetting resin, thereby producing a semiconductor wafer bonded body in which first connector portions and second connector portions are electrically connected together through solidified products obtained by melting and solidifying the solder bumps.
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