发明授权
US08040934B2 Vertical cavity surface emitting laser and method of manufacturing thereof 失效
垂直腔面发射激光器及其制造方法

Vertical cavity surface emitting laser and method of manufacturing thereof
摘要:
A vertical cavity surface emitting laser capable of reducing parasitic capacitance while suppressing power consumption, and a method of manufacturing thereof are provided. The vertical cavity surface emitting laser includes a columnar mesa including, on a substrate, a first multilayer reflector, an active layer, and a second multilayer reflector in order from the substrate side, and also including a current narrowing layer. The columnar portion of the mesa including the active layer and the current narrowing layer is formed within a region opposed to the first multilayer reflector and a region opposed to the second multilayer reflector, and a cross section area of the columnar portion is smaller than a cross section area of the second multilayer reflector.
信息查询
0/0