发明授权
- 专利标题: Transistors, semiconductor devices, assemblies and constructions
- 专利标题(中): 晶体管,半导体器件,组件和结构
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申请号: US12424392申请日: 2009-04-15
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公开(公告)号: US08044479B2公开(公告)日: 2011-10-25
- 发明人: Ted Taylor , Xiawan Yang
- 申请人: Ted Taylor , Xiawan Yang
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; H01L27/146
摘要:
Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
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