发明授权
US08048610B2 Sulfonium salt-containing polymer, resist composition, and patterning process
有权
含锍盐的聚合物,抗蚀剂组合物和图案化工艺
- 专利标题: Sulfonium salt-containing polymer, resist composition, and patterning process
- 专利标题(中): 含锍盐的聚合物,抗蚀剂组合物和图案化工艺
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申请号: US12428933申请日: 2009-04-23
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公开(公告)号: US08048610B2公开(公告)日: 2011-11-01
- 发明人: Youichi Ohsawa , Jun Hatakeyama , Seiichiro Tachibana , Takeshi Kinsho
- 申请人: Youichi Ohsawa , Jun Hatakeyama , Seiichiro Tachibana , Takeshi Kinsho
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2008-114116 20080424
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/20 ; G03F7/30 ; G03F7/38 ; G03F7/11
摘要:
A polymer comprising recurring units having formulae (1), (2) and (3) is provided as well as a chemically amplified resist composition comprising the same. R1 is H, F, CH3 or CF3, Rf is H, F, CF3 or C2F5, A is an optionally fluorine or oxygen-substituted divalent organic group, R2, R3 and R4 are alkyl, alkenyl, oxoalkyl, aryl, aralkyl or aryloxoalkyl, or may form a ring with the sulfur atom, N=0-2, R8 is H or alkyl, B is a single bond or optionally oxygen-substituted divalent organic group, a=0-3, b=1-3, and X is an acid labile group. The polymer generates a strong sulfonic acid which provides for effective cleavage of acid labile groups in a chemically amplified resist composition.
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