Invention Grant
US08049114B2 Package substrate with a cavity, semiconductor package and fabrication method thereof 有权
具有空腔的封装衬底,半导体封装及其制造方法

Package substrate with a cavity, semiconductor package and fabrication method thereof
Abstract:
A method of making a package substrate includes providing a cladding sheet comprising a first metal layer, a second metal layer and an intermediate layer between the first and second metal layers; etching away a portion of the first metal layer to expose a portion of the intermediate layer thereby forming a metal island body; laminating a first copper clad on the cladding sheet comprising a first copper foil and a first insulating layer; patterning the first copper foil to form a first circuit trace; patterning the second metal layer to form a second circuit trace; removing the metal island body to form a cavity in the first insulating layer; and removing the intermediate layer from bottom of the cavity.
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