Invention Grant
- Patent Title: Phase change memory device and method for manufacturing the same
- Patent Title (中): 相变存储器件及其制造方法
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Application No.: US12169612Application Date: 2008-07-08
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Publication No.: US08049199B2Publication Date: 2011-11-01
- Inventor: Yong Seok Eun , Su Jin Chae , Keum-Bum Lee , Heon-Yong Chang , Min-Yong Lee
- Applicant: Yong Seok Eun , Su Jin Chae , Keum-Bum Lee , Heon-Yong Chang , Min-Yong Lee
- Applicant Address: KR
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR
- Agency: Baker & McKenzie LLP
- Priority: KR10-2007-0081556 20070814
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L21/00

Abstract:
A phase change memory device and a method for manufacturing the same. The method includes the steps of defining bottom electrode contact holes by removing portions of an insulation layer, to expose bottom electrodes, on a semiconductor substrate on which the bottom electrodes and the insulation layer are sequentially formed; forming amorphous silicon spacers on inner sidewalls of the bottom electrode contact holes; and forming bottom electrode contacts in the bottom electrode contact holes.
Public/Granted literature
- US20090045389A1 PHASE CHANGE MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-02-19
Information query
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