发明授权
US08066806B2 Sintered silicon oxide for film vapor deposition, its production method, and method for producing silicon oxide vapor deposition film 有权
用于薄膜气相沉积的烧结氧化硅,其制造方法和氧化硅蒸镀膜的制造方法

Sintered silicon oxide for film vapor deposition, its production method, and method for producing silicon oxide vapor deposition film
摘要:
A sintered silicon oxide for film vapor deposition having a density of 1.0 to 2.0 g/cm3, three-point flexural strength of at least 50 g/mm2, and a BET specific surface area of 0.1 to 20 m2/g is provided. When this sintered silicon oxide is used for evaporation source of a film, pin holes and other defects of the film caused by the problematic splash phenomenon can be reliably prevented and stable production of a reliable package material having excellent gas barrier property is been enabled. This invention also provides a method for producing such sintered silicon oxide, and this method can be used in a large scale production without requiring any special technology, and therefore, this method is capable of supplying the market with the sintered silicon oxide at reduced cost.
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