发明授权
- 专利标题: Method for manufacturing a perpendicular magnetic write head with a wrap around shield
- 专利标题(中): 用于围绕屏蔽制造垂直磁写头的方法
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申请号: US12241751申请日: 2008-09-30
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公开(公告)号: US08066892B2公开(公告)日: 2011-11-29
- 发明人: Hung-Chin Guthrie , Yimin Hsu , Ming Jiang , Sue Siyang Zhang
- 申请人: Hung-Chin Guthrie , Yimin Hsu , Ming Jiang , Sue Siyang Zhang
- 申请人地址: NL Amsterdam
- 专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人地址: NL Amsterdam
- 代理机构: Zilka-Kotab, PC
- 主分类号: B44C1/22
- IPC分类号: B44C1/22
摘要:
A method for manufacturing a write pole for a perpendicular magnetic write head. The method employs a damascene process to construct the write pole with a very accurately controlled track width. The method includes depositing a layer of material that can be readily removed by reactive ion etching. This material can be referred to as a RIEable material. A mask is formed over the RIEable material and a reactive ion etching is performed to form a tapered trench in the RIEAble material. A CMP stop layer can the be deposited, and a write pole plated into the trench. A CMP can then be performed to define the trailing edge of the write pole. Another masking, etching and plating step can be performed to form a trailing, wrap-around magnetic shield.
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