发明授权
US08066892B2 Method for manufacturing a perpendicular magnetic write head with a wrap around shield 有权
用于围绕屏蔽制造垂直磁写头的方法

Method for manufacturing a perpendicular magnetic write head with a wrap around shield
摘要:
A method for manufacturing a write pole for a perpendicular magnetic write head. The method employs a damascene process to construct the write pole with a very accurately controlled track width. The method includes depositing a layer of material that can be readily removed by reactive ion etching. This material can be referred to as a RIEable material. A mask is formed over the RIEable material and a reactive ion etching is performed to form a tapered trench in the RIEAble material. A CMP stop layer can the be deposited, and a write pole plated into the trench. A CMP can then be performed to define the trailing edge of the write pole. Another masking, etching and plating step can be performed to form a trailing, wrap-around magnetic shield.
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