Invention Grant
- Patent Title: Micromechanical component and method for producing a micromechanical component
- Patent Title (中): 微机械部件及其制造方法
-
Application No.: US12451315Application Date: 2008-05-26
-
Publication No.: US08076739B2Publication Date: 2011-12-13
- Inventor: Peter Schmollngruber , Hans Artmann , Thomas Wagner
- Applicant: Peter Schmollngruber , Hans Artmann , Thomas Wagner
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007026445 20070606
- International Application: PCT/EP2008/056398 WO 20080526
- International Announcement: WO2008/148654 WO 20081211
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
A micromechanical component includes a substrate that has a front side and a backside, the front side having a functional pattern, which functional pattern is electrically contacted to the backside in a contact region. The substrate has at least one contact hole in the contact region, which extends into the substrate, starting from the backside.
Public/Granted literature
- US20100176469A1 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT Public/Granted day:2010-07-15
Information query
IPC分类:
