发明授权
- 专利标题: Semiconductor substrate, electronic device, optical device, and production methods therefor
- 专利标题(中): 半导体衬底,电子器件,光学器件及其制造方法
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申请号: US12087048申请日: 2007-03-15
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公开(公告)号: US08084281B2公开(公告)日: 2011-12-27
- 发明人: Naoki Shibata , Koji Hirata , Shiro Yamazaki , Katsuhiro Imai , Makoto Iwai , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura
- 申请人: Naoki Shibata , Koji Hirata , Shiro Yamazaki , Katsuhiro Imai , Makoto Iwai , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura
- 申请人地址: JP Nishikasugai-Gun, Aichi-Ken JP Nagoya-Shi, Aichi JP Suita-Shi, Osaka
- 专利权人: Toyoda Gosei Co., Ltd.,NGK Insulators, Ltd.,Osaka University
- 当前专利权人: Toyoda Gosei Co., Ltd.,NGK Insulators, Ltd.,Osaka University
- 当前专利权人地址: JP Nishikasugai-Gun, Aichi-Ken JP Nagoya-Shi, Aichi JP Suita-Shi, Osaka
- 代理机构: McGinn IP Law Group, PLLC
- 优先权: JP2006-072748 20060316; JP2006-122400 20060426
- 国际申请: PCT/JP2007/055942 WO 20070315
- 国际公布: WO2007/105832 WO 20070920
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
The present invention provides a method for producing a semiconductor substrate, the method including reacting nitrogen (N) with gallium (Ga), aluminum (Al), or indium (In), which are group III elements, in a flux mixture containing a plurality of metal elements selected from among alkali metals and alkaline earth metals, to thereby grow a group III nitride based compound semiconductor crystal. The group III nitride based compound semiconductor crystal is grown while the flux mixture and the group III element are mixed under stirring. At least a portion of a base substrate on which the group III nitride based compound semiconductor crystal is grown is formed of a flux-soluble material, and the flux-soluble material is dissolved in the flux mixture, at a temperature near the growth temperature of the group III nitride based compound semiconductor crystal, during the course of growth of the semiconductor crystal.
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