发明授权
- 专利标题: Method of forming replacement metal gate with borderless contact and structure thereof
- 专利标题(中): 用无边界接触形成替换金属门的方法及其结构
-
申请号: US12948246申请日: 2010-11-17
-
公开(公告)号: US08084311B1公开(公告)日: 2011-12-27
- 发明人: David V. Horak , Su Chen Fan , Theodorus E. Standaert
- 申请人: David V. Horak , Su Chen Fan , Theodorus E. Standaert
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Yuanmin Cai
- 主分类号: H01L21/338
- IPC分类号: H01L21/338 ; H01L21/336
摘要:
Embodiments of the present invention provide a method of forming borderless contact for transistor in a replacement metal gate process. The method includes forming a gate on top of a substrate and forming spacers adjacent to sidewalls of the gate; lowering height of the spacers to expose a top portion of the sidewalls of the gate; depositing an etch-stop layer covering the spacers and the upper portion of the sidewalls of the gate; making an opening at a level that is above the spacers and in the upper portion of the sidewalls to expose the gate; and replacing material of the gate from the opening with a new gate material thereby forming a replacement gate. The method further creates a via opening in an inter-level dielectric layer surrounding the gate and spacers, with the via opening exposing the etch-stop layer; removing the etch-stop layer and fill the via opening with a metal material to form borderless contact.
信息查询
IPC分类: