发明授权
- 专利标题: Semiconductor memory device
- 专利标题(中): 半导体存储器件
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申请号: US12562781申请日: 2009-09-18
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公开(公告)号: US08089120B2公开(公告)日: 2012-01-03
- 发明人: Hiroyasu Tanaka , Masaru Kidoh , Ryota Katsumata , Masaru Kito , Yosuke Komori , Megumi Ishiduki , Hideaki Aochi , Yoshiaki Fukuzumi
- 申请人: Hiroyasu Tanaka , Masaru Kidoh , Ryota Katsumata , Masaru Kito , Yosuke Komori , Megumi Ishiduki , Hideaki Aochi , Yoshiaki Fukuzumi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2008-282817 20081104
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113
摘要:
A semiconductor memory device includes: a semiconductor substrate; a stacked body with a plurality of conductive layers and a plurality of dielectric layers alternately stacked, the stacked body being provided on the semiconductor substrate; a semiconductor layer provided inside a hole formed through the stacked body, the semiconductor layer extending in stacking direction of the conductive layers and the dielectric layers; and a charge storage layer provided between the conductive layers and the semiconductor layer. The stacked body in a memory cell array region including a plurality of memory strings is divided into a plurality of blocks by slits with an interlayer dielectric film buried therein, the memory string including as many memory cells series-connected in the stacking direction as the conductive layers, the memory cell including the conductive layer, the semiconductor layer, and the charge storage layer provided between the conductive layer and the semiconductor layer, and each of the block is surrounded by the slits formed in a closed pattern.
公开/授权文献
- US20100109071A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2010-05-06
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