发明授权
- 专利标题: Nitride compound semiconductor element
- 专利标题(中): 氮化物半导体元件
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申请号: US11568481申请日: 2005-10-13
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公开(公告)号: US08093685B2公开(公告)日: 2012-01-10
- 发明人: Naomi Anzue , Toshiya Yokogawa , Yoshiaki Hasegawa
- 申请人: Naomi Anzue , Toshiya Yokogawa , Yoshiaki Hasegawa
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Renner, Otto, Boisselle & Sklar, LLP
- 优先权: JP2004-300907 20041015
- 国际申请: PCT/JP2005/018881 WO 20051013
- 国际公布: WO2006/041134 WO 20060420
- 主分类号: H01L29/20
- IPC分类号: H01L29/20
摘要:
A nitride compound semiconductor element according to the present invention is a nitride compound semiconductor element including a substrate 1 having an upper face and a lower face and a semiconductor multilayer structure 40 supported by the upper face of the substrate 1, such that the substrate 1 and the semiconductor multilayer structure 40 have at least two cleavage planes. At least one cleavage inducing member 3 which is in contact with either one of the two cleavage planes is provided, and a size of the cleavage inducing member 3 along a direction parallel to the cleavage plane is smaller than a size of the upper face of the substrate 1 along the direction parallel to the cleavage plane.
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