发明授权
- 专利标题: In-situ performance prediction of pad conditioning disk by closed loop torque monitoring
- 专利标题(中): 通过闭环力矩监测对垫片调节盘的现场性能预测
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申请号: US12187637申请日: 2008-08-07
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公开(公告)号: US08096852B2公开(公告)日: 2012-01-17
- 发明人: Sameer Deshpande , Shou-Sung Chang , Hung Chih Chen , Roy C Nangoy , Stan D Tsai
- 申请人: Sameer Deshpande , Shou-Sung Chang , Hung Chih Chen , Roy C Nangoy , Stan D Tsai
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Dergosits & Noah LLP
- 主分类号: B24B49/18
- IPC分类号: B24B49/18
摘要:
Polishing pads used in CMP machines are consumable components that are typically replaced after a specific number of wafers have been processed. The life of a polishing pad is optimized by controlling the rate of material removal from the polishing pad by the conditioning disk. The conditioning disk removes enough material so the polishing surface can properly process the wafers but does not remove any excess material. Preventing excess material removal extends the life of the polishing pad. During CMP processing, the controller receives data concerning the torque applied to the conditioning disk and the torque applied to the arm to sweep the conditioning disk across the polishing pad. Based upon the detected operating conditions, the system can predict the rate of material removal and adjust the forces applied to the conditioning disk so that the life of the polishing pad is optimized.
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