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US08097518B2 Semiconductor device and manufacturing method therefor 有权
半导体装置及其制造方法

  • 专利标题: Semiconductor device and manufacturing method therefor
  • 专利标题(中): 半导体装置及其制造方法
  • 申请号: US12898968
    申请日: 2010-10-06
  • 公开(公告)号: US08097518B2
    公开(公告)日: 2012-01-17
  • 发明人: Masatomi Okanishi
  • 申请人: Masatomi Okanishi
  • 申请人地址: US CA Sunnyvale
  • 专利权人: Spansion LLC
  • 当前专利权人: Spansion LLC
  • 当前专利权人地址: US CA Sunnyvale
  • 主分类号: H01L21/336
  • IPC分类号: H01L21/336
Semiconductor device and manufacturing method therefor
摘要:
There is provided a semiconductor device including a semiconductor substrate (10), a high concentration diffusion region (22) formed within the semiconductor substrate (10), a first low concentration diffusion region (24) that has a lower impurity concentration than the high concentration diffusion region (22) and is provided under the high concentration diffusion region (22), and a bit line(30) that includes the high concentration diffusion region (22) and the first low concentration diffusion region (24) and serves as a source region and a drain region, and a manufacturing method therefor. Reduction of source-drain breakdown voltage of the transistor is suppressed, and a low-resistance bit line can be formed. Thus, a semiconductor device that can miniaturize memory cells and a manufacturing method therefor can be provided.
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