发明授权
US08099793B2 Scanning probe microscope with automatic probe replacement function
有权
扫描探头显微镜具有自动探头更换功能
- 专利标题： Scanning probe microscope with automatic probe replacement function
- 专利标题（中）： 扫描探头显微镜具有自动探头更换功能
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申请号： US12569680申请日： 2009-09-29
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公开(公告)号： US08099793B2公开(公告)日： 2012-01-17
- 发明人: Hyeong Chan Jo , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
- 申请人： Hyeong Chan Jo , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
- 申请人地址： KR Suwon
- 专利权人： Park Systems Corp.
- 当前专利权人： Park Systems Corp.
- 当前专利权人地址： KR Suwon
- 代理机构： Patterson & Sheridan, LLP
- 优先权： KR10-2006-0132038 20061221
- 主分类号： H01J37/00
- IPC分类号： H01J37/00
摘要：
An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.
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