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公开(公告)号：US20100037360A1
公开(公告)日：2010-02-11
申请号：US12569680
申请日：2009-09-29
申请人： Hyeong Chan JO , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
发明人： Hyeong Chan JO , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
CPC分类号： G01Q70/02
摘要： An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.
摘要翻译： 用于扫描探针显微镜（SPM）的自动探针交换系统基于差分磁力在SPM上的探针安装座与探针托盘上的探针支架之间交换探头。 当SPM侧的磁力较大时，探头连接到SPM上的探头安装座上。 当探头托架侧的磁力较大时，探头将连接到探头托盘上的探头安装座上。 探头托盘侧的磁力通过移动产生磁力的磁铁在探头托盘一侧靠近或远离探头而变化。
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公开(公告)号：US20080149829A1
公开(公告)日：2008-06-26
申请号：US11872614
申请日：2007-10-15
申请人： Hyeong Chan Jo , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
发明人： Hyeong Chan Jo , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
IPC分类号： H01J37/28
CPC分类号： G01Q70/02
摘要： Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.
摘要翻译： 提供了一种扫描探针显微镜（SPM），其探头可以自动更换，更换探头可以安装到精确位置。 SPM包括具有承载架的第一扫描器，并且将载体保持器的位置改变为直线; 第二扫描仪改变样品在平面上的位置; 以及托盘，其能够存储备用载体和附接到备用载体的备用探头。 承载架包括多个突起。
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公开(公告)号：US07709791B2
公开(公告)日：2010-05-04
申请号：US11872614
申请日：2007-10-15
申请人： Hyeong Chan Jo , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
发明人： Hyeong Chan Jo , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
CPC分类号： G01Q70/02
摘要： Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.
摘要翻译： 提供了一种扫描探针显微镜（SPM），其探头可以自动更换，更换探头可以安装到精确位置。 SPM包括具有承载架的第一扫描器，并且将载体保持器的位置改变为直线; 第二扫描仪改变样品在平面上的位置; 以及托盘，其能够存储备用载体和附接到备用载体的备用探头。 承载架包括多个突起。
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公开(公告)号：US08099793B2
公开(公告)日：2012-01-17
申请号：US12569680
申请日：2009-09-29
申请人： Hyeong Chan Jo , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
发明人： Hyeong Chan Jo , Hong Jae Lim , Seung Jun Shin , Joon Hui Kim , Yong Seok Kim , Sang-il Park
IPC分类号： H01J37/00
CPC分类号： G01Q70/02
摘要： An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.
摘要翻译： 用于扫描探针显微镜（SPM）的自动探针交换系统基于差分磁力在SPM上的探针安装座与探针托盘上的探针支架之间交换探头。 当SPM侧的磁力较大时，探头连接到SPM上的探头安装座上。 当探头托架侧的磁力较大时，探头将连接到探头托盘上的探头安装座上。 探头托盘侧的磁力通过移动产生磁力的磁铁在探头托盘一侧靠近或远离探头而变化。
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