Invention Grant
US08105917B2 Connection pad structure for an image sensor on a thinned substrate 有权
用于薄型衬底上的图像传感器的连接垫结构

  • Patent Title: Connection pad structure for an image sensor on a thinned substrate
  • Patent Title (中): 用于薄型衬底上的图像传感器的连接垫结构
  • Application No.: US12518030
    Application Date: 2007-12-11
  • Publication No.: US08105917B2
    Publication Date: 2012-01-31
  • Inventor: Pierre Blanchard
  • Applicant: Pierre Blanchard
  • Applicant Address: FR
  • Assignee: E2V Semiconductors
  • Current Assignee: E2V Semiconductors
  • Current Assignee Address: FR
  • Agency: Lowe Hauptman Ham & Berner, LLP
  • Priority: FR0611083 20061220
  • International Application: PCT/EP2007/063691 WO 20071211
  • International Announcement: WO2008/074691 WO 20080626
  • Main IPC: H01L21/30
  • IPC: H01L21/30
Connection pad structure for an image sensor on a thinned substrate
Abstract:
The invention relates to the fabrication of electronic circuits on a thinned semiconductor substrate. To produce a connection pad on the back side of the thinned substrate, the procedure is as follows: an integrated circuit is produced on an unthinned substrate, in which a portion of a polycrystalline silicon layer (18) dedicated for the connection of the pad is provided. The circuit is transferred onto a transfer substrate (30) and then its back side is thinned. A via is opened in the thinned semiconductor layer (12) in order to gain access to the polycrystalline silicon; aluminum (80) is deposited and this layer is etched so as to define a pad which is in contact with the internal interconnects of the integrated circuit by way of the polycrystalline silicon.
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