发明授权
- 专利标题： Method and apparatus for creating time-resolved emission images of integrated circuits using a single-point single-photon detector and a scanning system
- 专利标题（中）： 使用单点单光子检测器和扫描系统创建集成电路的时间分辨发射图像的方法和装置
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申请号： US11621217申请日： 2007-01-09
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公开(公告)号： US08115170B2公开(公告)日： 2012-02-14
- 发明人: Franco Stellari , Alberto Tosi , Franco Zappa , Peilin Song
- 申请人： Franco Stellari , Alberto Tosi , Franco Zappa , Peilin Song
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Tutunjian & Bitetto, P.C.
- 代理商 Anne V. Dougherty
- 主分类号： G01N21/01
- IPC分类号： G01N21/01 ; G01N21/17 ; G01N21/64
摘要：
A Scanning Time-Resolved Emission (S-TRE) microscope or system includes an optical system configured to collect light from emissions of light generated by a device under test (DUT). A scanning system is configured to permit the emissions of light to be collected from positions across the DUT in accordance with a scan pattern. A timing photodetector is configured to detect a single photon or photons of the emissions of light from the particular positions across the DUT such that the emissions of light are correlated to the positions to create a time-dependent map of the emissions of light across the DUT.
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