Invention Grant
- Patent Title: Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device
- Patent Title (中): 压电致动器配有位移计,压电元件和定位装置
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Application No.: US12276740Application Date: 2008-11-24
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Publication No.: US08115367B2Publication Date: 2012-02-14
- Inventor: Masato Iyoki
- Applicant: Masato Iyoki
- Applicant Address: JP Chiba
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2007-304798 20071126; JP2008-278548 20081029
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H01L41/047

Abstract:
By resistor attached by a piezoelectric element, measurement with high accuracy is possible by strain of the piezoelectric element. A piezoelectric actuator includes the piezoelectric element which is formed into an arbitrary shape, polarized in an arbitrary direction, and includes electrodes provided on at least two surfaces opposed in a thickness direction thereof. The piezoelectric actuator also includes a driver power supply for applying a voltage between the electrodes to generate strain in the piezoelectric element, a driver power supply for applying a voltage to generate strain in the piezoelectric element, resistors provided on the electrodes through intermediation of insulators, and a displacement detection device connected with the resistors. The electrodes of the piezoelectric element on which the resistors are provided are set at a ground potential.
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