Invention Grant
US08115367B2 Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device 有权
压电致动器配有位移计,压电元件和定位装置

Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device
Abstract:
By resistor attached by a piezoelectric element, measurement with high accuracy is possible by strain of the piezoelectric element. A piezoelectric actuator includes the piezoelectric element which is formed into an arbitrary shape, polarized in an arbitrary direction, and includes electrodes provided on at least two surfaces opposed in a thickness direction thereof. The piezoelectric actuator also includes a driver power supply for applying a voltage between the electrodes to generate strain in the piezoelectric element, a driver power supply for applying a voltage to generate strain in the piezoelectric element, resistors provided on the electrodes through intermediation of insulators, and a displacement detection device connected with the resistors. The electrodes of the piezoelectric element on which the resistors are provided are set at a ground potential.
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