Invention Grant
- Patent Title: Method for producing a semiconductor component and a semiconductor component produced according to the method
- Patent Title (中): 用于制造根据该方法制造的半导体部件和半导体部件的方法
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Application No.: US12152241Application Date: 2008-05-12
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Publication No.: US08123963B2Publication Date: 2012-02-28
- Inventor: Hubert Benzel , Heribert Weber , Hans Artmann , Frank Schaefer
- Applicant: Hubert Benzel , Heribert Weber , Hans Artmann , Frank Schaefer
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE10032579 20000705
- Main IPC: H01L21/302
- IPC: H01L21/302 ; B81C1/00

Abstract:
A method for producing a semiconductor component includes forming an n-doped layer in a p-doped layer of the semiconductor component, wherein the n-doped layer comprises at least one of: a sieve-like layer or a network-like layer. The method also includes porously etching the p-doped layer between the material of the n-doped layer to form a top electrode, and forming a cavity below the n-doped layer.
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