发明授权
US08124327B2 Method for using compositions containing fluorocarbinols in lithographic processes
有权
在光刻工艺中使用含有氟代甲醇的组合物的方法
- 专利标题： Method for using compositions containing fluorocarbinols in lithographic processes
- 专利标题（中）： 在光刻工艺中使用含有氟代甲醇的组合物的方法
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申请号： US12794208申请日： 2010-06-04
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公开(公告)号： US08124327B2公开(公告)日： 2012-02-28
- 发明人: Gregory Breyta , Daniel Paul Sanders , Hoa D. Truong
- 申请人： Gregory Breyta , Daniel Paul Sanders , Hoa D. Truong
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： CanaanLaw, P.C.
- 代理商 Karen Canaan
- 主分类号： G03F7/20
- IPC分类号： G03F7/20
摘要：
The present invention involves a method for generating a photoresist image on a substrate. The method comprises coating a substrate with a film comprising a polymer comprising fluorocarbinol monomers; imagewise exposing the film to radiation; heating the film to a temperature of, at, or below about 90° C. and developing the image. The present invention also relates to a method for generating a photoresist image on a substrate where a polymer comprising fluorocarbinol monomers is used as a protective top coat.
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